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Ceramic substrate, method of manufacturing ceramic substrate, and method of manufacturing power module substrate
Disclosed is a ceramic substrate including silicon in which the concentration of a silicon oxide and a silicon composite oxide in the surface thereof is less than or equal to 2.7 Atom %.
Ceramic substrate, method of manufacturing ceramic substrate, and method of manufacturing power module substrate
Disclosed is a ceramic substrate including silicon in which the concentration of a silicon oxide and a silicon composite oxide in the surface thereof is less than or equal to 2.7 Atom %.
Ceramic substrate, method of manufacturing ceramic substrate, and method of manufacturing power module substrate
TONOMURA HIROSHI (author) / KITAHARA TAKESHI (author) / ISHIZUKA HIROYA (author) / KUROMITSU YOSHIROU (author) / NAGATOMO YOSHIYUKI (author)
2015-07-14
Patent
Electronic Resource
English
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