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Piezoelectric element, piezoelectric actuator, piezoelectric sensor, hard disk drive, and inkjet printer device

AIDA YASUHIRO / KURACHI KATSUYUKI / SAKUMA HITOSHI / MAEJIMA KAZUHIKO

An object is to reduce the leakage current of a piezoelectric element including a potassium-sodium niobate thin film, enhance the reliability of the piezoelectric element and, in addition, enhance the withstand voltage by including a pair of electrodes and a piezoelectric layer sandwiched between the above-described pair of electrode layers, wherein the above-described piezoelectric layer is provided with at least one layer each of first piezoelectric layer which is a potassium-sodium niobate thin film substantially not containing Mn (manganese) and second piezoelectric layer which is a potassium-sodium niobate thin film containing Mn.

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Piezoelectric element, piezoelectric actuator, piezoelectric sensor, hard disk drive, and inkjet printer device

AIDA YASUHIRO / KURACHI KATSUYUKI / SAKUMA HITOSHI / MAEJIMA KAZUHIKO

An object is to reduce the leakage current of a piezoelectric element including a potassium-sodium niobate thin film, enhance the reliability of the piezoelectric element and, in addition, enhance the withstand voltage by including a pair of electrodes and a piezoelectric layer sandwiched between the above-described pair of electrode layers, wherein the above-described piezoelectric layer is provided with at least one layer each of first piezoelectric layer which is a potassium-sodium niobate thin film substantially not containing Mn (manganese) and second piezoelectric layer which is a potassium-sodium niobate thin film containing Mn.

Piezoelectric element, piezoelectric actuator, piezoelectric sensor, hard disk drive, and inkjet printer device

AIDA YASUHIRO / KURACHI KATSUYUKI / SAKUMA HITOSHI / MAEJIMA KAZUHIKO

An object is to reduce the leakage current of a piezoelectric element including a potassium-sodium niobate thin film, enhance the reliability of the piezoelectric element and, in addition, enhance the withstand voltage by including a pair of electrodes and a piezoelectric layer sandwiched between the above-described pair of electrode layers, wherein the above-described piezoelectric layer is provided with at least one layer each of first piezoelectric layer which is a potassium-sodium niobate thin film substantially not containing Mn (manganese) and second piezoelectric layer which is a potassium-sodium niobate thin film containing Mn.

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Titel:

Piezoelectric element, piezoelectric actuator, piezoelectric sensor, hard disk drive, and inkjet printer device

Beteiligte:

AIDA YASUHIRO (Autor:in) / KURACHI KATSUYUKI (Autor:in) / SAKUMA HITOSHI (Autor:in) / MAEJIMA KAZUHIKO (Autor:in)

Erscheinungsdatum:

29.09.2015

Medientyp:

Patent

Format:

Elektronische Ressource

Sprache:

Englisch

Klassifikation:

IPC: H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES / C04B Kalk , LIME

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