Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
In2O3—SnO2—ZnO sputtering target
A sputtering target including indium (In), tin (Sn) and zinc (Zn) and an oxide including one or more elements X selected from the following group X, the atomic ratio of the elements satisfying the following formulas (1) to (4): Group X: Mg, Si, Al, Sc, Ti, Y, Zr, Hf, Ta, La, Nd, Sm 0.10≰In/(In+Sn+Zn)≰0.85 (1) 0.01≰Sn/(In+Sn+Zn)≰0.40 (2) 0.10≰Zn/(In+Sn+Zn)≰0.70 (3) 0.70≰In/(In+X)≰0.99 (4).
In2O3—SnO2—ZnO sputtering target
A sputtering target including indium (In), tin (Sn) and zinc (Zn) and an oxide including one or more elements X selected from the following group X, the atomic ratio of the elements satisfying the following formulas (1) to (4): Group X: Mg, Si, Al, Sc, Ti, Y, Zr, Hf, Ta, La, Nd, Sm 0.10≰In/(In+Sn+Zn)≰0.85 (1) 0.01≰Sn/(In+Sn+Zn)≰0.40 (2) 0.10≰Zn/(In+Sn+Zn)≰0.70 (3) 0.70≰In/(In+X)≰0.99 (4).
In2O3—SnO2—ZnO sputtering target
ITOSE MASAYUKI (Autor:in) / NISHIMURA MAMI (Autor:in) / SUNAGAWA MISA (Autor:in) / KASAMI MASASHI (Autor:in) / YANO KOKI (Autor:in)
15.12.2015
Patent
Elektronische Ressource
Englisch
| British Library Online Contents | 2002
Phase equilibria in the pseudo-binary In2O3–SnO2 system
| British Library Online Contents | 2007
Optical properties of In2O3 oxidized from InN deposited by reactive magnetron sputtering
| British Library Online Contents | 2006