Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
High temperature gas line heater system including silicone foam rubber
A semi-flexible laminar silicone foam rubber-base heater for high temperature gas supply and exhaust lines used in microelectronic semiconductor fabrication uses superimposed adhesively bonded layers of an etched foil heater element containing layer, a high-to-low heat thermal transition layer, a thermal fuse laden silicone foam rubber insulation layer and a durable wrapping layer. The system can provide for the combined use of highly controllable etched foil heater elements, clean silicone foam rubber insulation, and inexpensive mechanical thermal fuses safely in a high heat gas supply and exhaust line environment.
High temperature gas line heater system including silicone foam rubber
A semi-flexible laminar silicone foam rubber-base heater for high temperature gas supply and exhaust lines used in microelectronic semiconductor fabrication uses superimposed adhesively bonded layers of an etched foil heater element containing layer, a high-to-low heat thermal transition layer, a thermal fuse laden silicone foam rubber insulation layer and a durable wrapping layer. The system can provide for the combined use of highly controllable etched foil heater elements, clean silicone foam rubber insulation, and inexpensive mechanical thermal fuses safely in a high heat gas supply and exhaust line environment.
High temperature gas line heater system including silicone foam rubber
SMITH JASON S (Autor:in) / CLAUSEN CASEY C (Autor:in) / KREISEL JAMES H (Autor:in) / RESTIS THOMAS J (Autor:in)
21.02.2017
Patent
Elektronische Ressource
Englisch
IPC:
E03B
Anlagen oder Verfahren zum Gewinnen, Sammeln oder Verteilen von Wasser
,
INSTALLATIONS OR METHODS FOR OBTAINING, COLLECTING, OR DISTRIBUTING WATER
/
F24H
FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, IN GENERAL
,
Erhitzer für flüssige oder gasförmige Stoffe, z.B. Wasser- oder Lufterhitzer mit Vorrichtungen zur Wärmeerzeugung, allgemein
/
H01L
Halbleiterbauelemente
,
SEMICONDUCTOR DEVICES
/
H05B
ELECTRIC HEATING
,
Elektrische Heizung
Preparation of silicone rubber foam using supercritical carbon dioxide
| British Library Online Contents | 2014
Multi-scale Simulation of Silicone Rubber Foam Under Compression
| British Library Online Contents | 2014
Experimental Study of Dynamic Mechanical Behaviors of Silicone Rubber Foam
| British Library Online Contents | 1999
| Springer Verlag | 1999