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A platform for research: civil engineering, architecture and urbanism
High temperature gas line heater system including silicone foam rubber
A semi-flexible laminar silicone foam rubber-base heater for high temperature gas supply and exhaust lines used in microelectronic semiconductor fabrication uses superimposed adhesively bonded layers of an etched foil heater element containing layer, a high-to-low heat thermal transition layer, a thermal fuse laden silicone foam rubber insulation layer and a durable wrapping layer. The system can provide for the combined use of highly controllable etched foil heater elements, clean silicone foam rubber insulation, and inexpensive mechanical thermal fuses safely in a high heat gas supply and exhaust line environment.
High temperature gas line heater system including silicone foam rubber
A semi-flexible laminar silicone foam rubber-base heater for high temperature gas supply and exhaust lines used in microelectronic semiconductor fabrication uses superimposed adhesively bonded layers of an etched foil heater element containing layer, a high-to-low heat thermal transition layer, a thermal fuse laden silicone foam rubber insulation layer and a durable wrapping layer. The system can provide for the combined use of highly controllable etched foil heater elements, clean silicone foam rubber insulation, and inexpensive mechanical thermal fuses safely in a high heat gas supply and exhaust line environment.
High temperature gas line heater system including silicone foam rubber
SMITH JASON S (author) / CLAUSEN CASEY C (author) / KREISEL JAMES H (author) / RESTIS THOMAS J (author)
2017-02-21
Patent
Electronic Resource
English
IPC:
E03B
Anlagen oder Verfahren zum Gewinnen, Sammeln oder Verteilen von Wasser
,
INSTALLATIONS OR METHODS FOR OBTAINING, COLLECTING, OR DISTRIBUTING WATER
/
F24H
FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, IN GENERAL
,
Erhitzer für flüssige oder gasförmige Stoffe, z.B. Wasser- oder Lufterhitzer mit Vorrichtungen zur Wärmeerzeugung, allgemein
/
H01L
Halbleiterbauelemente
,
SEMICONDUCTOR DEVICES
/
H05B
ELECTRIC HEATING
,
Elektrische Heizung
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