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CaF2 polycrystalline body, focus ring, plasma processing apparatus, and method for producing CaF2 polycrystalline body
A CaF2 polycrystalline body which is a polycrystalline body constituted of CaF2 and of which an average grain size of crystalline grains is 200 μm or more, and a method for producing a CaF2 polycrystalline body, the method including a process of introducing a compact which is obtained by using a CaF2 powder raw material into a vacuum sintering furnace and sintering at a temperature of not higher than 1400° C. for six hours or more, thereby obtaining the CaF2 polycrystalline body.
CaF2 polycrystalline body, focus ring, plasma processing apparatus, and method for producing CaF2 polycrystalline body
A CaF2 polycrystalline body which is a polycrystalline body constituted of CaF2 and of which an average grain size of crystalline grains is 200 μm or more, and a method for producing a CaF2 polycrystalline body, the method including a process of introducing a compact which is obtained by using a CaF2 powder raw material into a vacuum sintering furnace and sintering at a temperature of not higher than 1400° C. for six hours or more, thereby obtaining the CaF2 polycrystalline body.
CaF2 polycrystalline body, focus ring, plasma processing apparatus, and method for producing CaF2 polycrystalline body
FUJIWARA SEISHI (Autor:in) / UEHARA NAOYASU (Autor:in) / NARUKAWA YUKA (Autor:in)
28.02.2017
Patent
Elektronische Ressource
Englisch
IPC:
C01F
COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
,
Verbindungen der Metalle Beryllium, Magnesium, Aluminium, Calcium, Strontium, Barium, Radium, Thorium oder der Seltenen Erden
/
C04B
Kalk
,
LIME
/
C30B
SINGLE-CRYSTAL GROWTH
,
Züchten von Einkristallen
/
G02B
Optische Elemente, Systeme oder Geräte
,
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
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