Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
CaF2 POLYCRYSTALLINE CaF2 MEMBER MEMBER FOR PLASMA TREATMENT DEVICE PLASMA TREATMENT DEVICE AND PROCESS FOR PRODUCING FOCUSING RING
다결정 CaF부재는 CaF로 이루어지는 복수의 다결정체를 압착한 조합체로 이루어진다.
CaF2 POLYCRYSTALLINE CaF2 MEMBER MEMBER FOR PLASMA TREATMENT DEVICE PLASMA TREATMENT DEVICE AND PROCESS FOR PRODUCING FOCUSING RING
다결정 CaF부재는 CaF로 이루어지는 복수의 다결정체를 압착한 조합체로 이루어진다.
CaF2 POLYCRYSTALLINE CaF2 MEMBER MEMBER FOR PLASMA TREATMENT DEVICE PLASMA TREATMENT DEVICE AND PROCESS FOR PRODUCING FOCUSING RING
다결정 CaF2 부재, 플라즈마 처리 장치용 부재, 플라즈마 처리 장치 및 포커스 링의 제조 방법
24.12.2019
Patent
Elektronische Ressource
Koreanisch
IPC:
H01L
Halbleiterbauelemente
,
SEMICONDUCTOR DEVICES
/
C01F
COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
,
Verbindungen der Metalle Beryllium, Magnesium, Aluminium, Calcium, Strontium, Barium, Radium, Thorium oder der Seltenen Erden
/
C04B
Kalk
,
LIME
/
H01J
Elektrische Entladungsröhren oder Entladungslampen
,
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
| Europäisches Patentamt | 2018
| Europäisches Patentamt | 2017
PLASMA RESISTANT MEMBER, PLASMA TREATMENT DEVICE COMPONENT, AND PLASMA TREATMENT DEVICE
| Europäisches Patentamt | 2023
CaF2 translucent ceramics and manufacturing method of CaF2 translucent ceramics
| Europäisches Patentamt | 2017
MEMBER FOR PLASMA TREATMENT DEVICES, AND PLASMA TREATMENT DEVICE
| Europäisches Patentamt | 2020