Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
ZnO-Based Surface Acoustic Wave Droplet Sensor
In this work we designed and fabricated a ZnO-based SAW sensor with focused aluminum IDTs for DI water droplet sensing. We employed ZnO/SiO2/Si as the piezoelectric substrate in this study. A minimum measurable DI water droplet of 6 mgr was obtained in the presented SAW sensor.
ZnO-Based Surface Acoustic Wave Droplet Sensor
In this work we designed and fabricated a ZnO-based SAW sensor with focused aluminum IDTs for DI water droplet sensing. We employed ZnO/SiO2/Si as the piezoelectric substrate in this study. A minimum measurable DI water droplet of 6 mgr was obtained in the presented SAW sensor.
ZnO-Based Surface Acoustic Wave Droplet Sensor
Soleimanpour, Farzaneh (Autor:in) / Darbari, Sara (Autor:in) / Barahimi, Behdad (Autor:in) / Moravvej-Farshi, Mohammad Kazem (Autor:in)
25.10.2023
4984625 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
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