A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
ZnO-Based Surface Acoustic Wave Droplet Sensor
In this work we designed and fabricated a ZnO-based SAW sensor with focused aluminum IDTs for DI water droplet sensing. We employed ZnO/SiO2/Si as the piezoelectric substrate in this study. A minimum measurable DI water droplet of 6 mgr was obtained in the presented SAW sensor.
ZnO-Based Surface Acoustic Wave Droplet Sensor
In this work we designed and fabricated a ZnO-based SAW sensor with focused aluminum IDTs for DI water droplet sensing. We employed ZnO/SiO2/Si as the piezoelectric substrate in this study. A minimum measurable DI water droplet of 6 mgr was obtained in the presented SAW sensor.
ZnO-Based Surface Acoustic Wave Droplet Sensor
Soleimanpour, Farzaneh (author) / Darbari, Sara (author) / Barahimi, Behdad (author) / Moravvej-Farshi, Mohammad Kazem (author)
2023-10-25
4984625 byte
Conference paper
Electronic Resource
English
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