A new resistive probe with higher resolution: Fid-Bau Portal

A new resistive probe with higher resolution

Jaehong Lee, / Junsoo Kim, / Juhwan Jung, / Seungbum Hong, / Byung-Gook Park, / Jong Duk Lee, / Hyungcheol Shin,

We have proposed a new apex shaped semiconductor probe with resistive tip [1]. Its improved characteristics are shown by using three-dimensional simulation tool (SILVACO^™).

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A new resistive probe with higher resolution

Jaehong Lee, / Junsoo Kim, / Juhwan Jung, / Seungbum Hong, / Byung-Gook Park, / Jong Duk Lee, / Hyungcheol Shin,

Abstract

We have proposed a new apex shaped semiconductor probe with resistive tip [1]. Its improved characteristics are shown by using three-dimensional simulation tool (SILVACO^™).

A new resistive probe with higher resolution

Jaehong Lee, / Junsoo Kim, / Juhwan Jung, / Seungbum Hong, / Byung-Gook Park, / Jong Duk Lee, / Hyungcheol Shin,

Abstract

We have proposed a new apex shaped semiconductor probe with resistive tip [1]. Its improved characteristics are shown by using three-dimensional simulation tool (SILVACO^™).