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A new resistive probe with higher resolution
We have proposed a new apex shaped semiconductor probe with resistive tip [1]. Its improved characteristics are shown by using three-dimensional simulation tool (SILVACO™).
A new resistive probe with higher resolution
We have proposed a new apex shaped semiconductor probe with resistive tip [1]. Its improved characteristics are shown by using three-dimensional simulation tool (SILVACO™).
A new resistive probe with higher resolution
Jaehong Lee, (author) / Junsoo Kim, (author) / Juhwan Jung, (author) / Seungbum Hong, (author) / Byung-Gook Park, (author) / Jong Duk Lee, (author) / Hyungcheol Shin, (author)
2006-10-01
850253 byte
Conference paper
Electronic Resource
English
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