Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Laser Microphotochemistry for Use in Solid-State Electronics
Laser Microphotochemistry for Use in Solid-State Electronics
Laser Microphotochemistry for Use in Solid-State Electronics
D. J. Ehrlich (Autor:in) / R. M. Osgood (Autor:in) / T. F. Deutsch (Autor:in)
1980
12 pages
Report
Keine Angabe
Englisch
Photo & Radiation Chemistry , Physical & Theoretical Chemistry , Lasers , Photochemical reactions , Gas surface interactions , Microelectronics , Laser beams , Ultraviolet radiation , Organometallic compounds , Surface chemistry , Halides , Vapor phases , Molecules , Photodissociation , Deposition , Etching , Doping , Semiconductors , Reprints , NTISDODXR
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