A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Laser Microphotochemistry for Use in Solid-State Electronics
Laser Microphotochemistry for Use in Solid-State Electronics
Laser Microphotochemistry for Use in Solid-State Electronics
D. J. Ehrlich (author) / R. M. Osgood (author) / T. F. Deutsch (author)
1980
12 pages
Report
No indication
English
Photo & Radiation Chemistry , Physical & Theoretical Chemistry , Lasers , Photochemical reactions , Gas surface interactions , Microelectronics , Laser beams , Ultraviolet radiation , Organometallic compounds , Surface chemistry , Halides , Vapor phases , Molecules , Photodissociation , Deposition , Etching , Doping , Semiconductors , Reprints , NTISDODXR
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