Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Transport Phenomena in Plasma Processing
Applications of plasma processing are ever increasing, while a multitude of plasma-based techniques are being developed. Although this field has “hand and foot” (1), only in recent years can one witness a growing activity in the theoretical modeling and in the experimental characterization of basic quantities and phenomena of interest in plasma processing. Recent reviews include refs. (2–5).
Transport Phenomena in Plasma Processing
Applications of plasma processing are ever increasing, while a multitude of plasma-based techniques are being developed. Although this field has “hand and foot” (1), only in recent years can one witness a growing activity in the theoretical modeling and in the experimental characterization of basic quantities and phenomena of interest in plasma processing. Recent reviews include refs. (2–5).
Transport Phenomena in Plasma Processing
Auciello, Orlando (Herausgeber:in) / Gras-Marti, Alberto (Herausgeber:in) / Valles-Abarca, Jose Antonia (Herausgeber:in) / Flamm, Daniel L. (Herausgeber:in) / Gras-Martí, Alberto (Autor:in) / Vallés-Abarca, José-Antonio (Autor:in) / Moreno-Marín, Juan-Carlos (Autor:in)
Plasma-Surface Interactions and Processing of Materials ; Kapitel: 5 ; 135-146
NATO ASI Series ; 176
01.01.1990
12 pages
Aufsatz/Kapitel (Buch)
Elektronische Ressource
Englisch
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