A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Transport Phenomena in Plasma Processing
Applications of plasma processing are ever increasing, while a multitude of plasma-based techniques are being developed. Although this field has “hand and foot” (1), only in recent years can one witness a growing activity in the theoretical modeling and in the experimental characterization of basic quantities and phenomena of interest in plasma processing. Recent reviews include refs. (2–5).
Transport Phenomena in Plasma Processing
Applications of plasma processing are ever increasing, while a multitude of plasma-based techniques are being developed. Although this field has “hand and foot” (1), only in recent years can one witness a growing activity in the theoretical modeling and in the experimental characterization of basic quantities and phenomena of interest in plasma processing. Recent reviews include refs. (2–5).
Transport Phenomena in Plasma Processing
Auciello, Orlando (editor) / Gras-Marti, Alberto (editor) / Valles-Abarca, Jose Antonia (editor) / Flamm, Daniel L. (editor) / Gras-Martí, Alberto (author) / Vallés-Abarca, José-Antonio (author) / Moreno-Marín, Juan-Carlos (author)
Plasma-Surface Interactions and Processing of Materials ; Chapter: 5 ; 135-146
NATO ASI Series ; 176
1990-01-01
12 pages
Article/Chapter (Book)
Electronic Resource
English
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