Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Nanostructure Fabrication II
Abstract In this final chapter, we outline a few of the fabrication sequences developed for fabricating nanoscale mechanical structures, using a range of substrates: Bulk, single crystal silicon; buried SiO2 heterostructures fabricated by SIMOX (Separation by IMplantation of OXygen) or by a wafer bonding technique; silicon single-crystal regrowth over patterned bulk silicon; and single-crystal GaAs heterostructures. We conclude with a brief discussion of critical point drying.
Nanostructure Fabrication II
Abstract In this final chapter, we outline a few of the fabrication sequences developed for fabricating nanoscale mechanical structures, using a range of substrates: Bulk, single crystal silicon; buried SiO2 heterostructures fabricated by SIMOX (Separation by IMplantation of OXygen) or by a wafer bonding technique; silicon single-crystal regrowth over patterned bulk silicon; and single-crystal GaAs heterostructures. We conclude with a brief discussion of critical point drying.
Nanostructure Fabrication II
Prof. Cleland, Andrew N. (Autor:in)
01.01.2003
12 pages
Aufsatz/Kapitel (Buch)
Elektronische Ressource
Englisch
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