Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Micro/Nanoscale Tribology of Mems Materials, Lubricants and Devices
Abstract The advances in silicon photolithographic process technology since the 1960s have led to the development of microcomponents or microdevices, known as microelectromechanical systems (MEMS). More recently, lithographic processes have been developed to process nonsilicon materials. The lithographic processes are being complemented with nonlithographic micromachining processes for fabrication of milliscale components or devices. Using these fabrication processes, researchers have fabricated a wide variety of miniaturized devices, such as acceleration, pressure and chemical sensors, linear and rotary actuators, electric motors, gear trains, gas turbines, nozzles, pumps, fluid valves, switches, grippers, tweezers, and optoelectronic devices with dimensions in the range of a couple to a few thousand microns (for an early review, see Peterson, 1982; for recent reviews, see Muller et al., 1990; Madou, 1997; Trimmer, 1997; Bhushan, 1998; Kovacs, 1998).
Micro/Nanoscale Tribology of Mems Materials, Lubricants and Devices
Abstract The advances in silicon photolithographic process technology since the 1960s have led to the development of microcomponents or microdevices, known as microelectromechanical systems (MEMS). More recently, lithographic processes have been developed to process nonsilicon materials. The lithographic processes are being complemented with nonlithographic micromachining processes for fabrication of milliscale components or devices. Using these fabrication processes, researchers have fabricated a wide variety of miniaturized devices, such as acceleration, pressure and chemical sensors, linear and rotary actuators, electric motors, gear trains, gas turbines, nozzles, pumps, fluid valves, switches, grippers, tweezers, and optoelectronic devices with dimensions in the range of a couple to a few thousand microns (for an early review, see Peterson, 1982; for recent reviews, see Muller et al., 1990; Madou, 1997; Trimmer, 1997; Bhushan, 1998; Kovacs, 1998).
Micro/Nanoscale Tribology of Mems Materials, Lubricants and Devices
Sundararajan, S. (Autor:in) / Bhushan, B. (Autor:in)
01.01.2001
30 pages
Aufsatz/Kapitel (Buch)
Elektronische Ressource
Englisch
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