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Tribology of MEMS
Tribology of MEMS
Tribology of MEMS
de Boer, M. P. (Autor:in) / Mayer, T. M. (Autor:in)
MRS BULLETIN- MATERIALS RESEARCH SOCIETY ; 26 ; 302-304
01.01.2001
3 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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