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Fracture Characteristic of Aged DLC Films Using Nano-indentation and Micro-indentation
In this study, we performed fracture tests on thermally aged DLC thin films by using micro-indentation and nano-indentation and investigated the deformation and fracture characteristics of these films. The aged high hydrogen films have better characteristics such as thermal and mechanical stability than low hydrogen films.
Fracture Characteristic of Aged DLC Films Using Nano-indentation and Micro-indentation
In this study, we performed fracture tests on thermally aged DLC thin films by using micro-indentation and nano-indentation and investigated the deformation and fracture characteristics of these films. The aged high hydrogen films have better characteristics such as thermal and mechanical stability than low hydrogen films.
Fracture Characteristic of Aged DLC Films Using Nano-indentation and Micro-indentation
Key Engineering Materials ; 321-323 ; 1374-1376
15.10.2006
3 pages
Aufsatz (Zeitschrift)
Elektronische Ressource
Englisch
Fracture Characteristic of Aged DLC Films Using Nano-indentation and Micro-indentation
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|Indentation fracture of low-dielectric constant films: Part II. Indentation fracture mechanics model
British Library Online Contents | 2008
|Indentation fracture of low-dielectric constant films: Part II. Indentation fracture mechanics model
British Library Online Contents | 2008
|Indentation fracture of low-dielectric constant films: Part II. Indentation fracture mechanics model
British Library Online Contents | 2008
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