Monte Carlo Simulation of Step Coverage by the Sputtering Method: Fid-Bau Portal

2nd International conference on computer applications to materials and molecular science and engineering, Computer aided innovation of new materials ; 1992 ; Yokohama; Japan

Published in:

Computer aided innovation of new materials ; 1637-1640

COMPUTER AIDED INNOVATION OF NEW MATERIALS

Publication date:

1993-01-01

Size:

4 pages

Remarks:

In 2 pts. Also known as CAMSE 92

ISBN:

044489778X

Type of media:

Conference paper

Type of material:

Language:

English

Keywords:

computer applications , materials science , computer aided innovation , new materials , CAMSE , materials engineering , molecular science

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