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Pulsed-laser deposition of boron nitride films on silicon [2498-08]
Pulsed-laser deposition of boron nitride films on silicon [2498-08]
Pulsed-laser deposition of boron nitride films on silicon [2498-08]
Schmauder, R. (author) / Dodel, G. (author) / Bilger, G. (author) / Prokhorov, A. M. / Pustovoy, V. I. / General Physics Institute; Moscow / Konstanz University
International conference on Advanced laser technologies, Laser methods of surface treatment and modification ; 1994 ; Constance; Germany
1995-01-01
7 pages
Also known as ALT'94
Conference paper
English
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