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FTIR reflectance characterization of SIMOX buried oxide layers [3425-01]
FTIR reflectance characterization of SIMOX buried oxide layers [3425-01]
FTIR reflectance characterization of SIMOX buried oxide layers [3425-01]
Yakovlev, V. A. (author) / Charpenay, S. (author) / Rosenthal, P. A. (author) / Solomon, P. R. (author) / Datla, R. V. / Hanssen, L. M. / SPIE
Conference, Optical diagnostic methods for inorganic transmissive materials ; 1998 ; San Diego; CA
1998-01-01
8 pages
Conference paper
English
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