Characterization of Si-on-insulator buried surfaces by FTIR and scatterometry [4103-16]: Fid-Bau Portal

Characterization of Si-on-insulator buried surfaces by FTIR and scatterometry [4103-16]

Yakovlev, V. A. / Bosch-Charpenay, S. / Rosenthal, P. A. / Solomon, P. R. / Xu, J. / Stover, J. C. / Anc, M. J. / Alles, M. L. / SPIE

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Characterization of Si-on-insulator buried surfaces by FTIR and scatterometry [4103-16]

Yakovlev, V. A. / Bosch-Charpenay, S. / Rosenthal, P. A. / Solomon, P. R. / Xu, J. / Stover, J. C. / Anc, M. J. / Alles, M. L. / SPIE

Characterization of Si-on-insulator buried surfaces by FTIR and scatterometry [4103-16]

Yakovlev, V. A. / Bosch-Charpenay, S. / Rosenthal, P. A. / Solomon, P. R. / Xu, J. / Stover, J. C. / Anc, M. J. / Alles, M. L. / SPIE

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Title:

Characterization of Si-on-insulator buried surfaces by FTIR and scatterometry [4103-16]

Contributors:

Yakovlev, V. A. (author) / Bosch-Charpenay, S. (author) / Rosenthal, P. A. (author) / Solomon, P. R. (author) / Xu, J. (author) / Stover, J. C. (author) / Anc, M. J. (author) / Alles, M. L. (author) / Hanssen, L. M. / SPIE

Conference:

Conference; 2nd, Optical diagnostic methods for inorganic materials ; 2000 ; San Diego, CA

Published in:

Optical diagnostic methods for inorganic materials ; 90-97

PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING ; 4103

Publication date:

2000-01-01

Size:

8 pages

ISBN:

0819437484

ISSN:

0277-786X

Type of media:

Conference paper

Type of material:

Language:

English

Keywords:

optical diagnostic methods , inorganic materials , SPIE

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