Nano-oxidation of semiconductor heterostructures with atomic force microscopes: technology and applications (Invited Paper) [4098-48]: Fid-Bau Portal

Nano-oxidation of semiconductor heterostructures with atomic force microscopes: technology and applications (Invited Paper) [4098-48]

Heinzel, T. M. / Luscher, S. / Fuhrer, A. / Salis, G. / Held, R. / Ensslin, K. / Wegscheider, W. / Bichler, M. / SPIE - International Society for Optical Engineering

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Nano-oxidation of semiconductor heterostructures with atomic force microscopes: technology and applications (Invited Paper) [4098-48]

Heinzel, T. M. / Luscher, S. / Fuhrer, A. / Salis, G. / Held, R. / Ensslin, K. / Wegscheider, W. / Bichler, M. / SPIE - International Society for Optical Engineering

Nano-oxidation of semiconductor heterostructures with atomic force microscopes: technology and applications (Invited Paper) [4098-48]

Heinzel, T. M. / Luscher, S. / Fuhrer, A. / Salis, G. / Held, R. / Ensslin, K. / Wegscheider, W. / Bichler, M. / SPIE - International Society for Optical Engineering

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Title:

Nano-oxidation of semiconductor heterostructures with atomic force microscopes: technology and applications (Invited Paper) [4098-48]

Contributors:

Heinzel, T. M. (author) / Luscher, S. (author) / Fuhrer, A. (author) / Salis, G. (author) / Held, R. (author) / Ensslin, K. (author) / Wegscheider, W. (author) / Bichler, M. (author) / Andrews, D. L. / SPIE - International Society for Optical Engineering

Conference:

Conference, Optical devices and diagnostics in materials science ; 2000 ; San Diego, CA

Published in:

Optical devices and diagnostics in materials science ; 52-64

PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING ; 4098

Publication date:

2000-01-01

Size:

13 pages

ISBN:

0819437433

ISSN:

0277-786X

Type of media:

Conference paper

Type of material:

Language:

English

Keywords:

optical devices , SPIE , materials science , optical engineering

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