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Ion beam nanosmoothing of sapphire and silicon carbide surfaces [4468-04]
Ion beam nanosmoothing of sapphire and silicon carbide surfaces [4468-04]
Ion beam nanosmoothing of sapphire and silicon carbide surfaces [4468-04]
Fenner, D. B. (author) / DiFilippo, V. (author) / Bennett, J. A. (author) / Tetreault, T. G. (author) / Hirvonen, J. K. (author) / Feldman, L. C. (author) / Knystautas, E. J. / Kirk, W. P. / Browning, V. / International Society for Optical Engineering
Conference, Engineering thin films with ion beams, nanoscale diagnostics, and molecular manufacturing ; 2001 ; San Diego, CA
2001-01-01
8 pages
Conference paper
English
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