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A platform for research: civil engineering, architecture and urbanism
Effects of nitrogen plasma immersion ion implantation in silicon [4468-16]
Effects of nitrogen plasma immersion ion implantation in silicon [4468-16]
Effects of nitrogen plasma immersion ion implantation in silicon [4468-16]
Rajkumar (author) / Kumar, M. (author) / George, P. J. (author) / Chari, K. S. (author) / Mukherjee, S. (author) / Knystautas, E. J. / Kirk, W. P. / Browning, V. / International Society for Optical Engineering
Conference, Engineering thin films with ion beams, nanoscale diagnostics, and molecular manufacturing ; 2001 ; San Diego, CA
2001-01-01
9 pages
Conference paper
English
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