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In-line methods of optical diagnostics in the field of standardization and metrology [4468-08]
In-line methods of optical diagnostics in the field of standardization and metrology [4468-08]
In-line methods of optical diagnostics in the field of standardization and metrology [4468-08]
Constantinov, B. I. (author) / Sircu, S. (author) / Knystautas, E. J. / Kirk, W. P. / Browning, V. / International Society for Optical Engineering
Conference, Engineering thin films with ion beams, nanoscale diagnostics, and molecular manufacturing ; 2001 ; San Diego, CA
2001-01-01
8 pages
Conference paper
English
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