A platform for research: civil engineering, architecture and urbanism
Strategies for High Rate Reactive Sputtering
Strategies for High Rate Reactive Sputtering
Strategies for High Rate Reactive Sputtering
Nadel, S. J. (author) / Greene, P. (author) / Vitkala, J. / Tamglass
7th, International conference on architectural and automotive glass; Glass processing days ; 2001 ; Tampere, Finland
2001-01-01
7 pages
Conference paper
English
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Recent Results on Reactive Magnetron Sputtering for High-Rate Deposition of Ceramic Compound Films
British Library Online Contents | 1998
|Study on Deposition Rate of AlN Thin Films Using Reactive Magnetron Sputtering
British Library Online Contents | 2002
|Synthesis of AlN by reactive sputtering
British Library Online Contents | 1997
|Modeling target erosion during reactive sputtering
British Library Online Contents | 2015
|High photo-responsivity ZnO UV detectors fabricated by RF reactive sputtering
British Library Online Contents | 2013
|