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    Alumina Porous Membranes Obtained by One-Step Anodizing Process in H2SO4 for MEMS Packaging

    New search for: Rico, R. H.
    New search for: Celis, J.
    New search for: Bois, B. D.
    New search for: Van Hoof, C.
    New search for: Witvrouw, A.
    New search for: Ruythooren, W.
    New search for: Traversa, E.

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    Alumina Porous Membranes Obtained by One-Step Anodizing Process in H2SO4 for MEMS Packaging

    New search for: Rico, R. H.
    New search for: Celis, J.
    New search for: Bois, B. D.
    New search for: Van Hoof, C.
    New search for: Witvrouw, A.
    New search for: Ruythooren, W.
    New search for: Traversa, E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Alumina Porous Membranes Obtained by One-Step Anodizing Process in H2SO4 for MEMS Packaging

    New search for: Rico, R. H.
    New search for: Celis, J.
    New search for: Bois, B. D.
    New search for: Van Hoof, C.
    New search for: Witvrouw, A.
    New search for: Ruythooren, W.
    New search for: Traversa, E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
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    Document information
    Title:

    Alumina Porous Membranes Obtained by One-Step Anodizing Process in H2SO4 for MEMS Packaging

    Contributors:

    Rico, R. H. (author) / Celis, J. (author) / Bois, B. D. (author) / Van Hoof, C. (author) / Witvrouw, A. (author) / Ruythooren, W. (author) / Traversa, E. / Electrochemical Society

    Conference:

    Symposium, Nanostructured metal oxides: processing and applications ; 2006 ; Cancun, Mexico

    Published in:

    Nanostructured metal oxides: processing and applications ; 75-84

    ECS TRANSACTIONS ; 3

    Publication date:

    2006-01-01

    Size:

    10 pages

    ISBN:

    9781566775090 , 1566775094

    Type of media:

    Conference paper

    Type of material:

    Print

    Language:

    English

    Keywords:

    Nanostructured metal oxides , Metal oxides

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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