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Morphological and Structural Characterization of TiN/ZrN Superlattices Deposited by Reactive R.F. Magnetron Sputtering
Morphological and Structural Characterization of TiN/ZrN Superlattices Deposited by Reactive R.F. Magnetron Sputtering
Morphological and Structural Characterization of TiN/ZrN Superlattices Deposited by Reactive R.F. Magnetron Sputtering
Rizzo, A. (author) / Signore, M.A. (author) / Di Luccio, T. (author) / Tagliente, M.A. (author) / de Riccardis, M.F. (author)
11th, International Ceramics Congress; CIMTEC 2006 ; 2006 ; Acireale, Italy
2006-01-01
6 pages
Includes bibliographical references and index
Conference paper
English
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