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Developments in Metrology in Support of Nanotechnology
Developments in Metrology in Support of Nanotechnology
Developments in Metrology in Support of Nanotechnology
Decker, J.E. (author) / Bogdanov, A. (author) / Eves, B.J. (author) / Goodchild, D. (author) / Johnston, L. (author) / Kim, N. (author) / McDermott, M. (author) / Munoz-Paniagua, D. (author) / Pekelsky, J.R. (author) / Wingar, S. (author)
International Symposium; 3rd, Nanotechnology in construction; proceedings of the NICOM3 ; 2009 ; Prague
2009-01-01
10 pages
Includes bibliographical references and index; Same papers on CD-ROM
Conference paper
English
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