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    Highly Controllable Nano-Texturing of Silicon Using Hydrogen-Assisted Reactive Ion Etching

    New search for: Mehran, M.
    New search for: Sanaee, Z.
    New search for: Mohajerzadeh, S.
    New search for: Riel, Heike

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    Highly Controllable Nano-Texturing of Silicon Using Hydrogen-Assisted Reactive Ion Etching

    New search for: Mehran, M.
    New search for: Sanaee, Z.
    New search for: Mohajerzadeh, S.
    New search for: Riel, Heike

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Highly Controllable Nano-Texturing of Silicon Using Hydrogen-Assisted Reactive Ion Etching

    New search for: Mehran, M.
    New search for: Sanaee, Z.
    New search for: Mohajerzadeh, S.
    New search for: Riel, Heike

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Document information
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    Document information
    Title:

    Highly Controllable Nano-Texturing of Silicon Using Hydrogen-Assisted Reactive Ion Etching

    Contributors:

    Mehran, M. (author) / Sanaee, Z. (author) / Mohajerzadeh, S. (author) / Riel, Heike / Materials Research Society

    Conference:

    MRS spring meeting; Low-dimensional functional nanostructures - fabrication, characterization and applications: symposium / ; 2010 ; San Francisco, CA

    Published in:

    MRS spring meeting; Low-dimensional functional nanostructures - fabrication, characterization and applications: symposium / ; 133-142

    MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS ; 1258

    Publication date:

    2010-01-01

    Size:

    10 pages

    Remarks:

    Includes bibliographical references and indexes.

    ISBN:

    9781605112350

    ISSN:

    0272-9172

    Type of media:

    Conference paper

    Type of material:

    Print

    Language:

    English

    Keywords:

    Low-dimensional functional nanostructures , Materials research , MRS

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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