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    Oxidation of Si(100) surfaces with ultrathin metal overlayers in ozone atmosphere

    New search for: Toda, F.
    New search for: Yamada, T.
    New search for: Abe, H.

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    Oxidation of Si(100) surfaces with ultrathin metal overlayers in ozone atmosphere

    New search for: Toda, F.
    New search for: Yamada, T.
    New search for: Abe, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Oxidation of Si(100) surfaces with ultrathin metal overlayers in ozone atmosphere

    New search for: Toda, F.
    New search for: Yamada, T.
    New search for: Abe, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Oxidation of Si(100) surfaces with ultrathin metal overlayers in ozone atmosphere

    Contributors:

    Toda, F. (author) / Yamada, T. (author) / Abe, H. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 60 ; 729

    Publication date:

    1992-01-01

    Size:

    729 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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