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    Oxidation behavior of TiAlN barrier layers with and without thin metal overlayers for memory capacitor applications

    New search for: Song, J.
    New search for: Kim, H. R.
    New search for: Park, J.
    New search for: Jeong, S.
    New search for: Hwang, C. S.

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    Oxidation behavior of TiAlN barrier layers with and without thin metal overlayers for memory capacitor applications

    New search for: Song, J.
    New search for: Kim, H. R.
    New search for: Park, J.
    New search for: Jeong, S.
    New search for: Hwang, C. S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Oxidation behavior of TiAlN barrier layers with and without thin metal overlayers for memory capacitor applications

    New search for: Song, J.
    New search for: Kim, H. R.
    New search for: Park, J.
    New search for: Jeong, S.
    New search for: Hwang, C. S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Oxidation behavior of TiAlN barrier layers with and without thin metal overlayers for memory capacitor applications

    Contributors:

    Song, J. (author) / Kim, H. R. (author) / Park, J. (author) / Jeong, S. (author) / Hwang, C. S. (author)

    Published in:

    JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 17 ; 1789-1794

    Publication date:

    2002-01-01

    Size:

    6 pages

    ISSN:

    0884-2914

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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