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Using the metal-oxide-polysilicon-silicon (MOPS) structure to determine LPCVD polysilicon quality
Using the metal-oxide-polysilicon-silicon (MOPS) structure to determine LPCVD polysilicon quality
Using the metal-oxide-polysilicon-silicon (MOPS) structure to determine LPCVD polysilicon quality
Carter, J. C. (author) / Evans, A. G. R. (author) / Throngnumchai, K. (author)
APPLIED SURFACE SCIENCE ; 63 ; 281
1993-01-01
281 pages
Article (Journal)
Unknown
DDC:
621.35
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