Using the metal-oxide-polysilicon-silicon (MOPS) structure to determine LPCVD polysilicon quality: Fid-Bau Portal

Using the metal-oxide-polysilicon-silicon (MOPS) structure to determine LPCVD polysilicon quality

Carter, J. C. / Evans, A. G. R. / Throngnumchai, K.

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Using the metal-oxide-polysilicon-silicon (MOPS) structure to determine LPCVD polysilicon quality

Carter, J. C. / Evans, A. G. R. / Throngnumchai, K.

Using the metal-oxide-polysilicon-silicon (MOPS) structure to determine LPCVD polysilicon quality

Carter, J. C. / Evans, A. G. R. / Throngnumchai, K.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Using the metal-oxide-polysilicon-silicon (MOPS) structure to determine LPCVD polysilicon quality

Contributors:

Carter, J. C. (author) / Evans, A. G. R. (author) / Throngnumchai, K. (author)

Published in:

APPLIED SURFACE SCIENCE ; 63 ; 281

Publication date:

1993-01-01

Size:

281 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 621.35

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