Using the metal-oxide-polysilicon-silicon (MOPS) structure to determine LPCVD polysilicon quality

Carter, J. C. / Evans, A. G. R. / Throngnumchai, K. | British Library Online Contents | 1993

Passivation and depassivation of electrically active centers in the polysilicon-oxide-silicon structures

Uritskaya, I. A. / Uritsky, V. Y. | British Library Online Contents | 1995

Gettering in silicon-on-insulator wafers with polysilicon layer

Savin, H. / Yli-Koski, M. / Haarahiltunen, A. et al. | British Library Online Contents | 2009

Characterisation of semi-insulating polysilicon oxygen doped silicon thin films

Lynch, S. / Greef, R. / Stoemenos, J. et al. | British Library Online Contents | 1995

Evaluation of silicon nitride and silicon carbide as efficient polysilicon grain-growth inhibitors

Cha, C. L. / Chor, E. F. / Jia, Y. M. et al. | British Library Online Contents | 1999