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    Metallic microdevices fabricated by deep-etch UV lithography

    New search for: Daniau, W.
    New search for: Ballandras, S.
    New search for: Bercot, P.
    New search for: Hauden, D.

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    Metallic microdevices fabricated by deep-etch UV lithography

    New search for: Daniau, W.
    New search for: Ballandras, S.
    New search for: Bercot, P.
    New search for: Hauden, D.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Metallic microdevices fabricated by deep-etch UV lithography

    New search for: Daniau, W.
    New search for: Ballandras, S.
    New search for: Bercot, P.
    New search for: Hauden, D.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Metallic microdevices fabricated by deep-etch UV lithography

    Contributors:

    Daniau, W. (author) / Ballandras, S. (author) / Bercot, P. (author) / Hauden, D. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- A ; 160 ; L5

    Publication date:

    1993-01-01

    Size:

    L5

    ISSN:

    0921-5093

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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