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Method for sputter rate determination in sputter depth profiling

Lopez, F. / Garcia-Cuenca, M. V. / Asensi, J. M. / Morenza, J. L.

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Method for sputter rate determination in sputter depth profiling

Lopez, F. / Garcia-Cuenca, M. V. / Asensi, J. M. / Morenza, J. L.

Method for sputter rate determination in sputter depth profiling

Lopez, F. / Garcia-Cuenca, M. V. / Asensi, J. M. / Morenza, J. L.

Access

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Method for sputter rate determination in sputter depth profiling

Contributors:

Lopez, F. (author) / Garcia-Cuenca, M. V. (author) / Asensi, J. M. (author) / Morenza, J. L. (author)

Published in:

APPLIED SURFACE SCIENCE ; 70/71 ; 68

Publication date:

1993-01-01

Size:

68 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 621.35

Lopez, F. / Garcia-Cuenca, M. V. / Asensi, J. M. et al. | British Library Online Contents | 1993

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Analytical and numerical depth resolution functions in sputter profiling

Hofmann, S. / Liu, Y. / Wang, J.Y. et al. | British Library Online Contents | 2014