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    Analytical and numerical depth resolution functions in sputter profiling

    New search for: Hofmann, S.
    New search for: Liu, Y.
    New search for: Wang, J. Y.
    New search for: Kovac, J.

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    Analytical and numerical depth resolution functions in sputter profiling

    New search for: Hofmann, S.
    New search for: Liu, Y.
    New search for: Wang, J. Y.
    New search for: Kovac, J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Analytical and numerical depth resolution functions in sputter profiling

    New search for: Hofmann, S.
    New search for: Liu, Y.
    New search for: Wang, J. Y.
    New search for: Kovac, J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
    Similar titles

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    Document information
    Title:

    Analytical and numerical depth resolution functions in sputter profiling

    Contributors:

    Hofmann, S. (author) / Liu, Y. (author) / Wang, J. Y. (author) / Kovac, J. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 314 ; 942-955

    Publication date:

    2014-01-01

    Size:

    14 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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