Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Oxidation of tantalum silicide thin films in an RF oxygen plasma

    New search for: Gomez-San Roman, R.
    New search for: Perez-Casero, R.
    New search for: Perriere, J.
    New search for: Enard, J. P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Oxidation of tantalum silicide thin films in an RF oxygen plasma

    New search for: Gomez-San Roman, R.
    New search for: Perez-Casero, R.
    New search for: Perriere, J.
    New search for: Enard, J. P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Oxidation of tantalum silicide thin films in an RF oxygen plasma

    New search for: Gomez-San Roman, R.
    New search for: Perez-Casero, R.
    New search for: Perriere, J.
    New search for: Enard, J. P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Oxidation of tantalum silicide thin films in an RF oxygen plasma

    Contributors:

    Gomez-San Roman, R. (author) / Perez-Casero, R. (author) / Perriere, J. (author) / Enard, J. P. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 70/71 ; 479

    Publication date:

    1993-01-01

    Size:

    479 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Oxidation of tantalum silicide thin films in an RF oxygen plasma

    Gomez-San Roman, R. / Perez-Casero, R. / Perriere, J. et al. | British Library Online Contents | 1993

    Tantalum-based high-entropy silicide anti-oxidation coating and method for preparing tantalum-based high-entropy silicide anti-oxidation coating by using slurry method

    LIU XINLI / TIAN DEXIANG / WANG DEZHI et al. | European Patent Office | 2024

    Free access

    Oxidation behavior of cobalt silicide and cobalt germanide thin films

    Prabhakaran, K. / Ogino, T. | British Library Online Contents | 1997

    Oxidation of TaSi~2 thin films on polycrystalline tantalum

    Ringeisen, F. / Alaoui, M. / Bolmont, D. et al. | British Library Online Contents | 1992

    Plasma enhanced chemical vapour deposition of tungsten and tungsten silicide thin films

    McClatchie, S. / Thomas, H. / Morgan, D. V. | British Library Online Contents | 1993

    Back to top