Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Plasma enhanced chemical vapour deposition of tungsten and tungsten silicide thin films

    New search for: McClatchie, S.
    New search for: Thomas, H.
    New search for: Morgan, D. V.
    New search for: Janssen, G. C. A. M.
    New search for: Jongste, J. F.
    New search for: Radelaar, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Plasma enhanced chemical vapour deposition of tungsten and tungsten silicide thin films

    New search for: McClatchie, S.
    New search for: Thomas, H.
    New search for: Morgan, D. V.
    New search for: Janssen, G. C. A. M.
    New search for: Jongste, J. F.
    New search for: Radelaar, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Plasma enhanced chemical vapour deposition of tungsten and tungsten silicide thin films

    New search for: McClatchie, S.
    New search for: Thomas, H.
    New search for: Morgan, D. V.
    New search for: Janssen, G. C. A. M.
    New search for: Jongste, J. F.
    New search for: Radelaar, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Plasma enhanced chemical vapour deposition of tungsten and tungsten silicide thin films

    Contributors:

    McClatchie, S. (author) / Thomas, H. (author) / Morgan, D. V. (author) / Janssen, G. C. A. M. / Jongste, J. F. / Radelaar, S.

    Published in:

    Proceedings of the Fifth European Workshop on Refractory Metals and Silicides ; 58

    APPLIED SURFACE SCIENCE ; 72

    Publication date:

    1993-01-01

    Size:

    58 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Plasma-Enhanced Deposition of Tungsten, Molybdenum, and Tungsten Silicide Films

    C. C. Tang / J. K. Chu / D. W. Hess | NTIS | 1982

    AIN thin films by plasma-enhanced chemical vapour deposition

    Lee, C. H. / Wu, C. T. / Pueng, C. Y. | British Library Online Contents | 1992

    Tungsten deposition by organometallic chemical vapour deposition with organotungsten precursors

    Spee, C. I. M. A. / Verbeek, F. / Kraaijkamp, J. G. et al. | British Library Online Contents | 1993

    Tungsten silicide films prepared by excimer laser rapid quenching

    D'Anna, E. / Leggieri, G. / Luches, A. et al. | British Library Online Contents | 1993

    Plasma Enhanced Chemical Vapor Deposition Nanocrystalline Tungsten Carbide Thin Film and Its Electro-catalytic Activity

    Zheng, H. / Ma, C. / Huang, J. et al. | British Library Online Contents | 2005

    Back to top