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Conformal deposition on a deep-trenched substrate by MOCVD
Conformal deposition on a deep-trenched substrate by MOCVD
Conformal deposition on a deep-trenched substrate by MOCVD
Kusakabe, Y. (author) / Ohnishi, H. (author) / Takahama, T. (author) / Goto, Y. (author)
APPLIED SURFACE SCIENCE ; 70/71 ; 763
1993-01-01
763 pages
Article (Journal)
Unknown
DDC:
621.35
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