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    Quantitative kinetic analysis of silicon nitridation

    New search for: Pigeon, R. G.
    New search for: Varma, A.

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    Quantitative kinetic analysis of silicon nitridation

    New search for: Pigeon, R. G.
    New search for: Varma, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Quantitative kinetic analysis of silicon nitridation

    New search for: Pigeon, R. G.
    New search for: Varma, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Document information
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    Document information
    Title:

    Quantitative kinetic analysis of silicon nitridation

    Contributors:

    Pigeon, R. G. (author) / Varma, A. (author)

    Published in:

    JOURNAL OF MATERIALS SCIENCE ; 28 ; 2999

    Publication date:

    1993-01-01

    Size:

    2999 pages

    ISSN:

    0022-2461

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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