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    Refractory Metal Nitride Encapsulation for Copper Wiring

    New search for: Li, J.
    New search for: Mayer, J. W.

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    Refractory Metal Nitride Encapsulation for Copper Wiring

    New search for: Li, J.
    New search for: Mayer, J. W.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Refractory Metal Nitride Encapsulation for Copper Wiring

    New search for: Li, J.
    New search for: Mayer, J. W.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Refractory Metal Nitride Encapsulation for Copper Wiring

    Contributors:

    Li, J. (author) / Mayer, J. W. (author)

    Published in:

    MRS BULLETIN- MATERIALS RESEARCH SOCIETY ; 18 ; 52

    Publication date:

    1993-01-01

    Size:

    52 pages

    ISSN:

    0883-7694

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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