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Characterization of the buffer layer in SiC heteroepitaxy

Becourt, N. / Cros, B. / Ponthenier, J. L. / Berjoan, R.

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Characterization of the buffer layer in SiC heteroepitaxy

Becourt, N. / Cros, B. / Ponthenier, J. L. / Berjoan, R.

Characterization of the buffer layer in SiC heteroepitaxy

Becourt, N. / Cros, B. / Ponthenier, J. L. / Berjoan, R.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Characterization of the buffer layer in SiC heteroepitaxy

Contributors:

Becourt, N. (author) / Cros, B. (author) / Ponthenier, J. L. (author) / Berjoan, R. (author)

Published in:

APPLIED SURFACE SCIENCE ; 68 ; 461

Publication date:

1993-01-01

Size:

461 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 621.35

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