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Ruthenium and ruthenium-based contacts to GaAs

Myburg, G. / Barnard, W. O. / Meyer, W. E. / Louw, C. W.

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Ruthenium and ruthenium-based contacts to GaAs

Myburg, G. / Barnard, W. O. / Meyer, W. E. / Louw, C. W.

Ruthenium and ruthenium-based contacts to GaAs

Myburg, G. / Barnard, W. O. / Meyer, W. E. / Louw, C. W.

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Order at Subito €

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Document information

Title:

Ruthenium and ruthenium-based contacts to GaAs

Contributors:

Myburg, G. (author) / Barnard, W. O. (author) / Meyer, W. E. (author) / Louw, C. W. (author)

Published in:

APPLIED SURFACE SCIENCE ; 70/71 ; 511

Publication date:

1993-01-01

Size:

511 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 621.35

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