Tantalum-Ruthenium Diffusion Barriers for Contacts to SiC: Fid-Bau Portal

Tantalum-Ruthenium Diffusion Barriers for Contacts to SiC

Wang, S. H. / Arnold, O. / Eichfeld, C. M. / Mohney, S. E. / Adedeji, A. V. / Williams, J. R.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Tantalum-Ruthenium Diffusion Barriers for Contacts to SiC

Wang, S. H. / Arnold, O. / Eichfeld, C. M. / Mohney, S. E. / Adedeji, A. V. / Williams, J. R.

Tantalum-Ruthenium Diffusion Barriers for Contacts to SiC

Wang, S. H. / Arnold, O. / Eichfeld, C. M. / Mohney, S. E. / Adedeji, A. V. / Williams, J. R.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Tantalum-Ruthenium Diffusion Barriers for Contacts to SiC

Contributors:

Wang, S. H. (author) / Arnold, O. (author) / Eichfeld, C. M. (author) / Mohney, S. E. (author) / Adedeji, A. V. (author) / Williams, J. R. (author) / Devaty, R. P. / Larkin, D. J. / Saddow, S. E.

Published in:

Silicon Carbide and Related Materials - 2005 ; 883-886

MATERIALS SCIENCE FORUM ; 527/529

Publication date:

2006-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Voss, L. F. / Stafford, L. / Gila, B. P. et al. | British Library Online Contents | 2008

Ruthenium and ruthenium-based contacts to GaAs

Myburg, G. / Barnard, W. O. / Meyer, W. E. et al. | British Library Online Contents | 1993

Ruthenium and ruthenium-based contacts to GaAs

Myburg, G. / Barnard, W. O. / Meyer, W. E. et al. | British Library Online Contents | 1993

Formation of contacts to shallow junctions using titanium silicide with diffusion barriers

Zagozdzon-Wosik, W. / Rusakova, I. / Gooty, S. R. et al. | British Library Online Contents | 1998

Use of TiB2 diffusion barriers for Ni/Au ohmic contacts on p-GaN

Voss, L. / Khanna, R. / Pearton, S. J. et al. | British Library Online Contents | 2006