Structural characterization and thermal stability of W/Si multilayers: Fid-Bau Portal

Structural characterization and thermal stability of W/Si multilayers

Brunel, M. / Enzo, S. / Jergel, M. / Luby, S.

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Structural characterization and thermal stability of W/Si multilayers

Brunel, M. / Enzo, S. / Jergel, M. / Luby, S.

Structural characterization and thermal stability of W/Si multilayers

Brunel, M. / Enzo, S. / Jergel, M. / Luby, S.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Structural characterization and thermal stability of W/Si multilayers

Contributors:

Brunel, M. (author) / Enzo, S. (author) / Jergel, M. (author) / Luby, S. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 8 ; 2600

Publication date:

1993-01-01

Size:

2600 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

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