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Surface Modification of Dense Silicon Nitride by Ion Techniques
Surface Modification of Dense Silicon Nitride by Ion Techniques
Surface Modification of Dense Silicon Nitride by Ion Techniques
Taut, C. (author) / Herrmann, M. (author) / Mucha, A. (author) / Hoffmann, M. J. / Becher, P. F. / Petzow, G.
1994-01-01
319 pages
Article (Journal)
Unknown
DDC:
620.11
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