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Zirconium dioxide thin films deposited by ALE using zirconium tetrachloride as precursor

Ritala, M. / Leskelae, M.

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Zirconium dioxide thin films deposited by ALE using zirconium tetrachloride as precursor

Ritala, M. / Leskelae, M.

Zirconium dioxide thin films deposited by ALE using zirconium tetrachloride as precursor

Ritala, M. / Leskelae, M.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Zirconium dioxide thin films deposited by ALE using zirconium tetrachloride as precursor

Contributors:

Ritala, M. (author) / Leskelae, M. (author)

Published in:

APPLIED SURFACE SCIENCE ; 75 ; 333

Publication date:

1994-01-01

Size:

333 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 621.35

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